SensArry > IT Solutions

SENSARRAY(SA)

[CA , USA] 

Features

Since direct measurements of hot plate temperatures do not accurately reflect wafer temperatures, 

SensArray developed the Process Probe 1840 instrumented wafer.

Website

In Situ Process Management | Chip Manufacturing | KLA

(https://www.kla.com/products/chip-manufacturing/in-situ-process-management)

Products 

Wired wafer/Wireless wafer

Application 

Temperature measuring(PVD, CVD, baking etc.)